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Published in 2021 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/abe246
Abstract: Flexible electronics require more compact interconnects for next-generation devices. Polymer devices can be bonded to integrated circuit chips, but combining flexible and rigid substrates poses unique technical challenges. Existing technologies either cannot achieve the density…
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Keywords:
methods chip;
chip integration;
bonding methods;
integration parylene ... See more keywords