Passivated Porous Silicon Membranes and Their Application to Optical Biosensing
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DOI: 10.3390/mi13010010
Abstract: A robust fabrication method for stable mesoporous silicon membranes using standard microfabrication techniques is presented. The porous silicon membranes were passivated through the atomic layer deposition of different metal oxides, namely aluminium oxide Al2O3, hafnium… read more here.
Keywords: passivated porous; membranes application; silicon; porous silicon ... See more keywords