Passivating antireflection coating of crystalline silicon using i/n a-Si:H/SiN trilayer
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DOI: 10.1016/j.jpcs.2021.110127
Abstract: Abstract Passivating antireflection coating of crystalline silicon has been experimentally studied using a three-layered stack, consisting of an i/n a-Si:H/SiN trilayer. The passivation property is characterized by the minority carrier lifetime, which shows ≳ 1 ms… read more here.
Keywords: antireflection coating; sin trilayer; passivating antireflection; antireflection ... See more keywords