Wireless LC-Type Passive Humidity Sensor Using Large-Area RF Magnetron Sputtered ZnO Films
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DOI: 10.1109/ted.2018.2849706
Abstract: We report on a ZnO-based LC-type passive humidity sensor (HS) using a scalable, large-area thin-film semiconductor fabrication process. The reported sensor is capable of monitoring relative humidity (RH) remotely. The fabricated sensor is 30 mm… read more here.
Keywords: humidity sensor; type passive; sensor using; passive humidity ... See more keywords