Multiple Pathways for Dissociative Adsorption of SiCl4 on the Si(100)-c(4×2) Surface
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DOI: 10.3390/sym15010213
Abstract: The adsorption of silicon tetrachloride (STC, SiCl4) on the silicon surface is a crucial process in polysilicon manufacture. However, the underlying mechanism for the adsorption remains highly uncertain. Here, new dissociative adsorption (DA) reaction pathways… read more here.
Keywords: adsorption; pathways dissociative; dimer; surface ... See more keywords