Method for improving the speed and pattern quality of a DMD maskless lithography system using a pulse exposure method.
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.460780
Abstract: Maskless lithography based on a digital micromirror device (DMD) has the advantages of high process flexibility and a low production cost. However, due to the trade-off relationship between the pixel size and exposure area, it… read more here.
Keywords: pattern quality; dmd; pulse exposure; method ... See more keywords
Lithographic pattern quality enhancement of DMD lithography with spatiotemporal modulated technology.
Sign Up to like & getrecommendations! Published in 2021 at "Optics letters"
DOI: 10.1364/ol.415788
Abstract: In this paper, we propose spatiotemporal modulation projection lithography (STPL) technology, which is a spatiotemporal modulation technology applied to the conventional digital micromirror device (DMD) projection lithography system. Through coordinating the micro-movement of the piezoelectric… read more here.
Keywords: pattern quality; lithography; quality enhancement; technology ... See more keywords
Quantitative analysis and modeling of line edge roughness in near-field lithography: toward high pattern quality in nanofabrication
Sign Up to like & getrecommendations! Published in 2019 at "Nanophotonics"
DOI: 10.1515/nanoph-2019-0031
Abstract: Abstract Quantitative analysis of line edge roughness (LER) is very important for understanding the root causes of LER and thereby improving the pattern quality in near-field lithography (NFL), because LER has become the main limiter… read more here.
Keywords: quality; quantitative analysis; near field; edge roughness ... See more keywords
Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting
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DOI: 10.3390/mi10100706
Abstract: Imprinting pressure is the significant factor for composite mould durability and pattern quality during UV nanoimprinting on complex surfaces. To solve these problems, the effects of imprinting pressure on the damage of flexible composite mould… read more here.
Keywords: pattern quality; composite mould; pressure; imprinting pressure ... See more keywords