Large scale fabrication of asymmetric 2D and 3D micro/nano array pattern structures using multi-beam interference lithography technique for Solar cell texturing application
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-3742-4
Abstract: A method for the large scale fabrication of nano/micro array patterned structure for solar Photovoltaics (PV) is demonstrated by the use of laser interference lithography (LIL) technique. Since micro/nano array patterned structures for photonic arrangement… read more here.
Keywords: technique; array; fabrication; pattern structures ... See more keywords