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Published in 2022 at "Nano letters"
DOI: 10.1021/acs.nanolett.1c04761
Abstract: Patterning materials with nanoscale features opens many research opportunities ranging from fundamental science to technological applications. However, current nanofabrication methods are ill-suited for sub-5 nm patterning and pattern transfer. We demonstrate the use of colloidal…
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Keywords:
transfer;
anisotropic pattern;
pattern transfer;
colloidal lithography ... See more keywords
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Published in 2019 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.9b10338
Abstract: A simple and convenient nanofabrication method is proposed to achieve nanopillar arrays by the pattern transfer of anodic aluminum oxide membrane, profiting from the expedite and efficient preparation process and regular hexagonal lattice patterns of…
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Keywords:
anodic aluminum;
pattern transfer;
oxide membrane;
aluminum oxide ... See more keywords
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Published in 2022 at "Polymers"
DOI: 10.3390/polym14040654
Abstract: Vapor phase infiltration into a self-assembled block copolymer (BCP) to create a hybrid material in one of the constituent blocks can enhance the etch selectivity for pattern transfer. Multiple pulse infiltration into carbohydrate-based high-χ BCP…
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Keywords:
infiltration;
infiltration synthesis;
sequential infiltration;
pattern transfer ... See more keywords