Measurement of two-dimensional thickness of micro-patterned thin film based on image restoration in a spectroscopic imaging reflectometer.
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DOI: 10.1364/ao.57.003423
Abstract: In this paper, we introduce a method to overcome the limitation of thickness measurement of a micro-patterned thin film. A spectroscopic imaging reflectometer system that consists of an acousto-optic tunable filter, a charge-coupled-device camera, and… read more here.
Keywords: image; patterned thin; thin film; micro patterned ... See more keywords