Articles with "patterning advanced" as a keyword



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Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review

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Published in 2018 at "Micromachines"

DOI: 10.3390/mi9120631

Abstract: Semiconductor device dimensions have been decreasing steadily over the past several decades, generating the need to overcome fundamental limitations of both the materials they are made of and the fabrication techniques used to build them.… read more here.

Keywords: stack patterning; modeling gate; technology; patterning advanced ... See more keywords