Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask
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DOI: 10.1063/1.5026362
Abstract: A simple approach is presented for designing complex oxide mesoscopic electronic devices based on the conducting interfaces of room temperature grown LaAlO3/SrTiO3 heterostructures. The technique is based entirely on methods known from conventional semiconductor processing… read more here.
Keywords: temperature; nanoscale patterning; patterning electronic; electronic devices ... See more keywords