High-quality patterning technique for polarization-enhanced (Ba0.67Sr0.33TiO3/LaNiO3)n multi-interface multilayer hetero-structure
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DOI: 10.1016/j.jallcom.2019.02.248
Abstract: Abstract In this paper, a fabrication method for a patterned (Ba0.67Sr0.33TiO3, BST/LaNiO3, LNO)n thin-film multilayer is reported. The multilayer films were deposited by radio-frequency (RF) magnetron sputtering. A patterning technique of the as-prepared multilayer thin… read more here.
Keywords: patterning technique; lanio3; ba0 67sr0; 67sr0 33tio3 ... See more keywords