SEM, EDX, AFM, and XPS analysis of surface microstructure and chemical composition of nanograting patterns on silicon substrates
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DOI: 10.1007/s11082-025-08106-2
Abstract: This study conducted a comprehensive characterization of the surface and electronic properties of nanograting patterns on a silicon substrate using SEM, EDX, AFM, and XPS techniques. SEM images confirmed well-shaped and periodic nanograting patterns with… read more here.
Keywords: nanograting patterns; surface; sem edx; patterns silicon ... See more keywords