Electrical response of Pt/Ru/PbZr 0.52 Ti 0.48 O 3 /Pt capacitor as function of lead precursor excess
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DOI: 10.1063/1.5004178
Abstract: We investigated the influence of the surface microstructure and chemistry of sol-gel grown PbZr0.52Ti0.48O3 (PZT) on the electrical performance of PZT-based metal-insulator-metal (MIM) capacitors as a function of Pb precursor excess. Using surface-sensitive, quantitative X-ray… read more here.
Keywords: capacitor function; pbzr capacitor; precursor excess; precursor ... See more keywords