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Published in 2020 at "Micromachines"
DOI: 10.3390/mi11121073
Abstract: We report the deposition and characterization of calcium lead titanate (PCT) thin films for pyroelectric detectors. PCT films of thicknesses ranging from ~250 to 400 nm were deposited on both silicon and Si/SiN/Ti/Au substrates at…
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Keywords:
thin films;
lead titanate;
films pyroelectric;
pct films ... See more keywords