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Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.01.032
Abstract: For UV nanoimprint lithography (UV-NIL) using polymer soft stamps, imprinting at ambient atmosphere brings additional challenges due to evaporated solvents and possible byproducts resulting from the interaction between the UV light, oxygen and the polymer-based…
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Keywords:
pdms pdms;
using layer;
ambient atmosphere;
consecutive imprints ... See more keywords
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Published in 2020 at "Progress in Organic Coatings"
DOI: 10.1016/j.porgcoat.2020.106021
Abstract: Abstract As an excellent barrier material, parylene has been widely used in plenty of fields. However, conventional parylenes cannot endure medical sterilization procedures, including high-temperature sterilization and ultraviolet disinfection, which restrict their medical applications. A…
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Keywords:
pdms pdms;
coatings antiadhesion;
parylene;
pdms ... See more keywords
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Published in 2019 at "Macromolecules"
DOI: 10.1021/acs.macromol.9b01598
Abstract: We have used anionic polymerization to synthesize polymers of linear and bottlebrush architecture each with a polydimethylsiloxane backbone. The blending of polymer architectures has the effect of ...
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Keywords:
pdms pdms;
ultrasoft pdms;
pdms;
structural analysis ... See more keywords
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Published in 2023 at "Polymers"
DOI: 10.3390/polym15041006
Abstract: Polydimethylsiloxane (PDMS) is a widely used material for soft lithography and microfabrication. PDMS exhibits some promising properties suitable for building microfluidic devices; however, bonding PDMS to PDMS and PDMS to other materials for multilayer structures…
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Keywords:
bonding strength;
polydimethylsiloxane pdms;
pdms pdms;
pdms ... See more keywords