Ultra-Shallow Doping B, Mg, Ni, Cu, Mn, Cr and Fe into SiC with Very High Surface Concentrations Based on Plasma Stimulated Room-Temperature Diffusion
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DOI: 10.1007/s11665-018-3782-z
Abstract: Very recently, we reported a novel doping method called plasma doping without any external bias (PDWOEB) for the introduction of some impurities into Si and GaN at room temperature (RT). In this work, the RT… read more here.
Keywords: ultra shallow; pdwoeb; surface concentrations; room temperature ... See more keywords