PECVD of Hexamethyldisiloxane Coatings Using Extremely Asymmetric Capacitive RF Discharge
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DOI: 10.3390/ma13092147
Abstract: An extremely asymmetric low-pressure discharge was used to study the composition of thin films prepared by PECVD using HMDSO as a precursor. The metallic chamber was grounded, while the powered electrode was connected to an… read more here.
Keywords: plasma; pecvd hexamethyldisiloxane; coatings using; extremely asymmetric ... See more keywords