The influence of the thermal annealing treatments on the microstructure and optical properties of a-C:H films prepared by PECVD method
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DOI: 10.1016/j.jnoncrysol.2019.03.041
Abstract: Abstract In this work, hydrogenated amorphous carbon (a-C:H) films were prepared by using a radio frequency (13.56 MHz) plasma enhanced chemical vapor deposition (PECVD) method at 220 °C. The influence of the annealing treatments on the microstructure… read more here.
Keywords: films prepared; spectroscopy; microstructure optical; pecvd method ... See more keywords