Articles with "pen lithography" as a keyword



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Photopolymerized Features via Beam Pen Lithography as a Novel Tool for the Generation of Large Area Protein Micropatterns.

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Published in 2022 at "Small"

DOI: 10.1002/smll.202105998

Abstract: A cantilever-free scanning probe lithography (CF-SPL)-based method for the rapid polymerization of nanoscale features on a surface via crosslinking and thiol-acrylate photoreactions is described, wherein the nanoscale position, height, and diameter of each feature can be finely and independently tuned.… read more here.

Keywords: protein; beam pen; lithography; pen lithography ... See more keywords
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Maskless beam pen lithography based on integrated microlens array and spatial-filter array

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Published in 2017 at "Optical Engineering"

DOI: 10.1117/1.oe.56.11.115104

Abstract: Abstract. A beam pen lithography system is proposed for ultraviolet (UV) patterning of complicated patterns in a maskless manner. The system consists of a single UV light-emitting diode (LED), a double-sided microlens/spatial-filter array (MLSFA), and… read more here.

Keywords: array; pen lithography; beam pen;