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Published in 2020 at "Polymer Testing"
DOI: 10.1016/j.polymertesting.2020.106669
Abstract: Abstract In post-CMP (chemical mechanical polishing) processing, the use of poly vinyl acetal (PVA) brushes to clean the wafer surface is one of the most effective and prominent techniques applied for the removal of CMP…
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Keywords:
pva brushes;
organic impurities;
pencil type;
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Published in 2018 at "Radiation Protection Dosimetry"
DOI: 10.1093/rpd/ncx106
Abstract: A pencil-type ionization chamber commonly used in computed tomography (CT) dosimetry is usually calibrated free in air, but used inside a PMMA CT phantom. Measurements and Monte Carlo simulations are used to investigate the validity…
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Keywords:
body phantom;
chamber;
calibration;
pencil type ... See more keywords