Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process
Sign Up to like & getrecommendations! Published in 2020 at "Polymer Testing"
DOI: 10.1016/j.polymertesting.2020.106669
Abstract: Abstract In post-CMP (chemical mechanical polishing) processing, the use of poly vinyl acetal (PVA) brushes to clean the wafer surface is one of the most effective and prominent techniques applied for the removal of CMP… read more here.
Keywords: pva brushes; organic impurities; pencil type;
CALIBRATION AND USE OF A PENCIL-TYPE CT CHAMBER: EFFECT OF THE PMMA BODY PHANTOM
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DOI: 10.1093/rpd/ncx106
Abstract: A pencil-type ionization chamber commonly used in computed tomography (CT) dosimetry is usually calibrated free in air, but used inside a PMMA CT phantom. Measurements and Monte Carlo simulations are used to investigate the validity… read more here.
Keywords: body phantom; chamber; calibration; pencil type ... See more keywords