Study on the Anodic Bonding Mechanism of Polymer Electrolyte and Aluminum Based on MEMS Sensor Package
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DOI: 10.1007/s10904-020-01461-5
Abstract: In this paper, Polyethylene oxide (PEO) is used as the main material to prepare PEO–LiClO 4 , a polymer electrolyte packaging material. The complexation mechanism of PEO–LiClO 4 was studied by fourier transform infrared (FT-IR)… read more here.
Keywords: peo; anodic bonding; bonding mechanism; peo liclo ... See more keywords