Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization
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DOI: 10.1007/s00542-020-04755-3
Abstract: In this communication, we have designed, simulated, performance improved, fabricated and characterized a shunt capacitive RF MEMS switch with perforated serpentine membrane (Au). Fabrication is done using surface micromachining with four masks. AlN dielectric material… read more here.
Keywords: serpentine membrane; shunt capacitive; capacitive mems; perforated serpentine ... See more keywords