Augmenting performance of a MEMS cantilever-based photonic crystal waveguide for switching applications.
Sign Up to like & getrecommendations! Published in 2019 at "Applied optics"
DOI: 10.1364/ao.58.008449
Abstract: In this paper, a micro-electro-mechanical system-based cantilever is integrated as a line defect on a photonic crystal silicon slab for optical switching applications. The elliptical holes are etched in the photonic crystal waveguide that result… read more here.
Keywords: mems cantilever; photonic crystal; augmenting performance; performance mems ... See more keywords
Study on a High Performance MEMS Infrared Thermopile Detector
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DOI: 10.3390/mi10120877
Abstract: This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into… read more here.
Keywords: detector; study high; mems infrared; performance mems ... See more keywords
A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13071071
Abstract: High-performance MEMS accelerometers usually use a pendulum structure with a larger mass. Although the performance of the device is guaranteed, the manufacturing cost is high. This paper proposes a method of fabricating high-performance MEMS accelerometers… read more here.
Keywords: cost; performance mems; tgv process; high performance ... See more keywords