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Published in 2017 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2017.08.037
Abstract: Abstract The present study analyzes the use of TiO2 layer as antireflection coating. TiO2 thin films were prepared on silicon substrate by electrochemical anodization process with thicknesses of 130 and 170 nm. The films exhibit a…
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Keywords:
tio2;
layer;
performance tio;
antireflection coating ... See more keywords