MoS2 for Enhanced Electrical Performance of Ultrathin Copper Films.
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DOI: 10.1021/acsami.9b03381
Abstract: Copper nanowires are widely used as on-chip interconnects due to their superior conductivity. However, with aggressive Cu interconnect scaling, surface scattering of electrons drastically increases the electrical resistivity. In this work, we have studied the… read more here.
Keywords: mos2 enhanced; enhanced electrical; copper; performance ultrathin ... See more keywords