Efficient fabrication method for non-periodic microstructures using one-step two-photon lithography and a metal lift-off process.
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DOI: 10.1364/ao.478893
Abstract: This paper presents a mask-less, flexible, efficient, and high-resolution fabrication method for non-periodic microstructures. Sub-wavelength micro-polarizer arrays, (MPAs) which are the most essential part of the focal plane polarimeters, are typical non-periodic structures. The grating… read more here.
Keywords: non periodic; fabrication; one step; periodic microstructures ... See more keywords