Raman scattering study of nanoscale Mo/Si and Mo/Be periodic multilayer structures
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DOI: 10.1116/6.0000408
Abstract: Investigation of the microstructure and phase analysis of the periodic Mo/Si and Mo/Be multilayers are essential for depositing high reflective multilayers that operate at soft x-ray to extreme ultraviolet radiations. Raman spectroscopy revealed the presence… read more here.
Keywords: raman scattering; phase; periodic multilayers; study nanoscale ... See more keywords