Bifurcation Analysis on the Periodic Response of a Comb Drive MEMS Resonator
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DOI: 10.3390/mi13020148
Abstract: In this paper, we investigate the bifurcation characteristics of a comb drive MEMS resonator. The method of averaging and the residue theorem are used to get a more accurate analytical solution for the periodic response.… read more here.
Keywords: response; periodic response; comb drive; bifurcation ... See more keywords
Inclination Effect on the Periodic Response of a Symmetrical MEMS Gyroscope
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DOI: 10.3390/mi13101569
Abstract: The inclination effect caused by fabrication errors on the periodic response of a symmetric MEMS gyroscope is investigated. The dynamic equation is established considering the inclination effect on support stiffness and electrostatic forces. The periodic… read more here.
Keywords: inclination; effect; inclination effect; mems gyroscope ... See more keywords