Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor
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DOI: 10.1109/tim.2020.3027929
Abstract: Previously, various techniques have been proposed for reducing the lift-off effect on the thickness measurement of the nonmagnetic films, including the peak-frequency feature and phase feature in the Dodd–Deed analytical formulation. To realize a real-time… read more here.
Keywords: phase term; term; feature; frequency feature ... See more keywords