Fate of bis-(4-tert-butyl phenyl)-iodonium under photolithography relevant irradiation and the environmental risk properties of the formed photoproducts
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DOI: 10.1007/s11356-022-19376-8
Abstract: Aryl-iodonium salts are utilized as photoacid generators (PAGs) in semiconductor photolithography and other photo-initiated manufacturing processes. Despite their utilization and suspected toxicity, the fate of these compounds within the perimeter of semiconductor fabrication plants is… read more here.
Keywords: tert butyl; bis tert; phenyl iodonium; butyl phenyl ... See more keywords