LAUSR

Phosphorus ionization in silicon doped by self-assembled macromolecular monolayers

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0 Published in 2017 at "AIP Advances"

DOI: 10.1063/1.4999232

Abstract: Individual dopant atoms can be potentially controlled at large scale by the self-assembly of macromolecular dopant carriers. However, low concentration phosphorus dopants often suffer from a low ionization rate due to defects and impurities introduced… read more here.

Keywords: phosphorus dopants; silicon doped; ionization silicon; ionization ... See more keywords