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Published in 2020 at "Ceramics International"
DOI: 10.1016/j.ceramint.2020.05.251
Abstract: Abstract Lithium phosphorus oxynitride (LiPON) is the most representative solid electrolyte in thin film battery applications. In addition, it has been used as an interfacial protective layer to improve the stability of cathode and anode…
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Keywords:
thin films;
phosphorus oxynitride;
process;
process conditions ... See more keywords
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Published in 2020 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.0c03578
Abstract: The development of novel materials that are compatible with nanostructured architectures is required to meet the demands of next-generation energy storage technologies. Atomic layer deposition (ALD) allows for the precise synthesis of new materials that…
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Keywords:
solid state;
phosphorus oxynitride;
ion;
sodium ... See more keywords