High pulsed power VCSEL arrays with polymer microlenses formed by photoacid diffusion.
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DOI: 10.1364/oe.392660
Abstract: We demonstrate millimeters-long VCSEL linear arrays with SU-8 epoxy-based microlenses that are directly patterned and cross-linked on the output apertures by a simple, photoacid-diffusion-aided photolithography technique. The linear arrays are capable of delivering >7 W… read more here.
Keywords: diffusion; power vcsel; photoacid diffusion; high pulsed ... See more keywords