Bioconcentration potential and microbial toxicity of onium cations in photoacid generators
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DOI: 10.1007/s11356-020-12250-5
Abstract: Despite the widespread utilization of onium salts as photoacid generators (PAGs) in semiconductor photolithography, their environmental, health, and safety (EHS) properties remain poorly understood. The present work reports the bioconcentration potential of five representative onium… read more here.
Keywords: potential microbial; onium; photoacid generators; bioconcentration potential ... See more keywords
Potential photoacid generators based on oxime sulfonates
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DOI: 10.1177/1747519819831829
Abstract: The bis-oxime of acenaphthenequinone and the mono-oxime of benzil have been sulfonated by reaction with 4-methylbenzenesulfonyl chloride and propylsulfonyl chloride. The four sulfonated oximes were characterised by X-ray single-crystal structure determinations. Some photochemical decompositions were… read more here.
Keywords: based oxime; photoacid generators; potential photoacid; oxime sulfonates ... See more keywords