Development of electrical enhanced photocatalysis polishing slurry for silicon carbide wafer
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DOI: 10.1177/1350650119864243
Abstract: Single-crystal silicon carbide, as one of the most promising next-generation semiconductor materials, should be polished with atomically smooth and damage-free surface to meet the requirements of semiconductor applications. The research presented in this paper aims… read more here.
Keywords: electrical enhanced; silicon carbide; wafer; photocatalysis polishing ... See more keywords