Heterogeneous integration of Si photodiodes on silicon nitride for near-visible light detection.
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DOI: 10.1364/ol.447636
Abstract: Silicon nitride (SiN) is used extensively to complement the standard silicon photonics portfolio. However, thus far demonstrated light sources and detectors on SiN have predominantly focused on telecommunication wavelengths. Yet, to unlock the full potential… read more here.
Keywords: silicon nitride; photonics; integration photodiodes; photodiodes silicon ... See more keywords