An Imperialist Competitive Algorithm Incorporating Remaining Cycle Time Prediction for Photolithography Machines Scheduling
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DOI: 10.1109/access.2018.2878414
Abstract: Photolithography machines are the common bottleneck in the semiconductor manufacturing system. The operation constraints in photolithography machines are very complicated, including wafers arriving over time, dedicated machine constraints for critical layers, auxiliary resources’ constraints, and… read more here.
Keywords: algorithm; photolithography machines; remaining cycle; time ... See more keywords