Articles with "photoresist hot" as a keyword



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Low-stray-light concave holographic gratings processed by combining the methods of photoresist hot-melting and oxygen-ion ashing.

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Published in 2020 at "Applied optics"

DOI: 10.1364/ao.386465

Abstract: The principal motivation for this paper is to reduce stray light and line roughness in concave holographic gratings (CHG). Compared with other previously reported line-smoothing grating techniques such as dynamic-exposure near-field holography, we successfully improve… read more here.

Keywords: stray light; holographic gratings; concave holographic; photoresist hot ... See more keywords