Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer.
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DOI: 10.1002/smll.201702422
Abstract: Pressure sensing is a crucial function for flexible and wearable electronics, such as artificial skin and health monitoring. Recent progress in material and device structure of pressure sensors has brought breakthroughs in flexibility, self-healing, and… read more here.
Keywords: based pressure; photoresist insulation; insulation layer; pressure sensor ... See more keywords