Articles with "photoresist layers" as a keyword



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3D hydrodynamic focusing in microscale channels formed with two photoresist layers

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Published in 2019 at "Microfluidics and Nanofluidics"

DOI: 10.1007/s10404-019-2293-z

Abstract: 3D hydrodynamic focusing was implemented with channel cross-section dimensions smaller than 10 μm. Microchannels were formed using sacrificial etching of two photoresist layers on a silicon wafer. The photoresist forms a plus-shaped prismatic focusing fluid junction… read more here.

Keywords: fluid; microscale channels; photoresist layers; focusing microscale ... See more keywords