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Published in 2021 at "Micron"
DOI: 10.1016/j.micron.2021.103068
Abstract: This article addresses extraction of physically meaningful information from STEM EELS and EDX spectrum-images using methods of Multivariate Statistical Analysis. The problem is interpreted in terms of data distribution in a multi-dimensional factor space, which…
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Keywords:
physically meaningful;
meaningful endmembers;
spectrum images;
extraction physically ... See more keywords