Mapping Oxidation and Wafer Cleaning to Device Characteristics Using Physics-Assisted Machine Learning
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DOI: 10.1021/acsomega.1c05552
Abstract: It is always highly desired to have a well-defined relationship between the chemistry in semiconductor processing and the device characteristics. With the shrinkage of technology nodes in the semiconductors roadmap, it becomes more complicated to… read more here.
Keywords: machine learning; device characteristics; physics assisted; physics ... See more keywords
Physics-assisted Generative Adversarial Network for X-Ray Tomography
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.460208
Abstract: X-ray tomography is capable of imaging the interior of objects in three dimensions non-invasively, with applications in biomedical imaging, materials science, electronic inspection, and other fields. The reconstruction process can be an ill-conditioned inverse problem,… read more here.
Keywords: physics; reconstruction; physics assisted; ray tomography ... See more keywords