Sliding Mode Tracking Control With Perturbation Estimation for Hysteresis Nonlinearity of Piezo-Actuated Stages
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Access"
DOI: 10.1109/access.2018.2840538
Abstract: Piezo-actuated stages are widely applied in the field of high-precision positioning. However, piezo-actuated stages produce hysteresis between the input voltage and the output displacement that negatively influences the positioning accuracy. In this paper, the Bouc–Wen… read more here.
Keywords: sliding mode; control; hysteresis; actuated stages ... See more keywords
Implementation of a Controller for a Space-Grade, Piezo-Actuated Fabry-Perot Interferometer
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DOI: 10.1109/access.2022.3197284
Abstract: A tunable Fabry-Perot interferometer (FPI) can be used as an optical band-pass filter. This type of filter is used in spectrometers and spectral imagers. The transmitted wavelength depends on the optical cavity adjusted by an… read more here.
Keywords: piezo actuated; fabry perot; controller; perot interferometer ... See more keywords
Reference-Adaptation Predictive Control Based on a Deep Parallel Model for Piezo-Actuated Stages
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Transactions on Control Systems Technology"
DOI: 10.1109/tcst.2024.3518920
Abstract: The intrinsic hysteresis nonlinearity of piezo-actuated stages (piezo stages) poses a significant challenge for precise trajectory tracking at high speeds. In response, we propose a deep parallel (dPara) model that effectively captures the dynamics of… read more here.
Keywords: actuated stages; piezo actuated; reference; model ... See more keywords
Optimum Design of a Piezo-Actuated Triaxial Compliant Mechanism for Nanocutting
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DOI: 10.1109/tie.2017.2787592
Abstract: A novel piezo-actuated compliant mechanism is developed to obtain triaxial translational motions with decoupled features for nanocutting. Analytical modeling of the working performance followed by Pareto-based multiobjective optimization is conducted for determining dimensions of the… read more here.
Keywords: optimum design; piezo actuated; mechanism; compliant mechanism ... See more keywords
Damping Control of Piezo-Actuated Nanopositioning Stages With Recursive Delayed Position Feedback
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DOI: 10.1109/tmech.2016.2639584
Abstract: This paper presents a new damping control scheme for piezo-actuated nanopositioning stages with recursive delayed position feedback (RDPF). The RDPF is proposed to attenuate the resonant mode of the nanopositioning stage in the inner feedback… read more here.
Keywords: feedback; position feedback; delayed position; piezo actuated ... See more keywords
HAMMER PEENING WITH A PIEZO-ACTUATED TOOL FOR SURFACE FINISHING
Sign Up to like & getrecommendations! Published in 2017 at "MM Science Journal"
DOI: 10.17973/mmsj.2017_12_201786
Abstract: Low roughness of free-form surfaces represents a challenge in production of forming tools. In the industry, the free-form surface is grinded and polished manually. The technology of hammer peening has the capability to replace the… read more here.
Keywords: actuated tool; hammer peening; surface; piezo actuated ... See more keywords
The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process
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DOI: 10.3390/mi16030353
Abstract: In this study, we present two configurations of piezo-actuated microspeakers, which were fabricated by combining a self-developed aerosol deposition method with the metal MEMS microfabrication process. The stainless steel used was structurally designed to enhance… read more here.
Keywords: piezo actuated; process; aerosol deposition; metal mems ... See more keywords