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Published in 2019 at "Optics express"
DOI: 10.1364/oe.27.028588
Abstract: We demonstrate a platform for phase and amplitude modulation in silicon nitride photonic integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled aluminum nitride actuators. The platform, fabricated in a CMOS foundry, enables scalable active…
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Keywords:
cryogenic temperatures;
compatible piezo;
visible wavelengths;
piezo optomechanically ... See more keywords