MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate
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DOI: 10.1088/1361-6439/aa7236
Abstract: In this paper, we present a flexible artificial basilar membrane (FABM) that mimics the passive mechanical frequency selectivity of the basilar membrane. The FABM is composed of a cantilever array made of piezoelectric aluminum nitride… read more here.
Keywords: aluminum nitride; artificial basilar; basilar membrane; piezoelectric aluminum ... See more keywords