Characteristic studies of a novel piezoelectric impedance micropump
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DOI: 10.1007/s00542-015-2769-z
Abstract: This study reports the design, fabrication and test of an innovative valveless piezoelectric impedance micropump. The impedance micropump includes two nickel electroforming components, a stainless steel vibration plate, two glass tubes, a piezoelectric actuator and… read more here.
Keywords: piezoelectric impedance; plate; stainless steel; micropump ... See more keywords