Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3536-0
Abstract: The main objective of this work is the assessment of a calibration method for piezoelectric MEMS resonators for simultaneous density and viscosity sensing. A device designed to resonate with the 2nd order out-of-plane modal vibration… read more here.
Keywords: viscosity; density viscosity; mems resonators; calibration ... See more keywords
Toward a Tunable AlN-Based Piezoelectric MEMS Microphone: Design, Characterization, and Analysis
Sign Up to like & getrecommendations! Published in 2025 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2025.3558897
Abstract: This work introduces a novel tunable piezoelectric MEMS microphone, featuring a fully clamped membrane and dual-sensing electrodes. The device achieves a baseline sensitivity of -39.31 dB, with tunability enabled by a DC tuning mechanism. The… read more here.
Keywords: aln based; tunable aln; mems microphone; piezoelectric mems ... See more keywords
A High-Performance 9.5% Scandium-Doped Aluminum Nitride Piezoelectric MEMS Hydrophone With Honeycomb Structure
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2021.3120806
Abstract: This letter presents a high-performance scandium-doped aluminum nitride (ScxAl1-xN, x = 9.5%) piezoelectric MEMS hydrophone. The doping of Sc increases the piezoelectric constants of the piezoelectric sensing layer and hence results in better receive sensitivity… read more here.
Keywords: tex math; mems hydrophone; piezoelectric mems; inline formula ... See more keywords
Resolution adjustable Lissajous scanning with piezoelectric MEMS mirrors.
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.476198
Abstract: We previously designed a dual-axis piezoelectric MEMS mirror with a low crosstalk gimbal structure, which is utilized as the key device for further research for laser beam scanning. This paper mainly focuses on studying the… read more here.
Keywords: mems mirror; resolution; piezoelectric mems; adjustable lissajous ... See more keywords
A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure
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DOI: 10.3390/mi13101608
Abstract: This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a… read more here.
Keywords: topology; cantilever; miniaturized piezoelectric; piezoelectric mems ... See more keywords