Dual-frequency piezoelectric micromachined ultrasonic transducers
Sign Up to like & getrecommendations! Published in 2019 at "Applied Physics Letters"
DOI: 10.1063/1.5097624
Abstract: A piezoelectric micromachined ultrasonic transducer (pMUT) operating at dual frequencies (3.75 MHz and 18 MHz) was designed to achieve an ultrasound-on-a-chip solution for next-generation biomedical applications. Optimal electrode configurations for the dual-frequency pMUT were analyzed using… read more here.
Keywords: frequency piezoelectric; dual frequency; piezoelectric micromachined; frequency ... See more keywords
ZnO thin film piezoelectric micromachined microphone with symmetric composite vibrating diaphragm
Sign Up to like & getrecommendations! Published in 2017 at "Smart Materials and Structures"
DOI: 10.1088/1361-665x/aa6ae9
Abstract: Residual stress is an important factor affecting the sensitivity of piezoelectric micromachined microphone. A symmetric composite vibrating diaphragm was adopted in the micro electro mechanical systems piezoelectric microphone to decrease the residual stress and improve… read more here.
Keywords: piezoelectric micromachined; zno; diaphragm; film ... See more keywords
Piezoelectric Micromachined Ultrasonic Transducer Array-Based Electronic Stethoscope for Internet of Medical Things
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Internet of Things Journal"
DOI: 10.1109/jiot.2022.3145863
Abstract: A piezoelectric micromachined ultrasonic transducer (PMUT) array-based smart electronic stethoscope is presented for Internet of Medical Things (IoMT). For the first time, an electronic stethoscope based on a high-performance PMUT array is demonstrated to record… read more here.
Keywords: ultrasonic transducer; micromachined ultrasonic; electronic stethoscope; piezoelectric micromachined ... See more keywords
A Novel Topology for Process Variation-Tolerant Piezoelectric Micromachined Ultrasonic Transducers
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2018.2876384
Abstract: This paper presents a novel architecture for piezoelectric micromachined ultrasonic transducers (PMUT) allowing for a drastic reduction in the impact of process variations on the accuracy of the resonant frequency. At the core of this… read more here.
Keywords: piezoelectric micromachined; topology; process; micromachined ultrasonic ... See more keywords
Piezoelectric Micromachined Ultrasonic Transducers With Pinned Boundary Structure
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.3001560
Abstract: This paper reports the approach to boost the acoustic performances of PMUTs (Piezoelectric Micromachined Ultrasonic Transducers) including vibrational amplitude, acoustic pressure and electromechanical coupling by using the pinning boundary structure. An analytical model is developed… read more here.
Keywords: boundary structure; piezoelectric micromachined; micromachined ultrasonic; ultrasonic transducers ... See more keywords
Piezoelectric Micromachined Ultrasonic Transducer Using Silk Piezoelectric Thin Film
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2018.2816646
Abstract: In this letter, we present for the first time, a successful fabrication and characterization of silk piezoelectric thin film-based piezoelectric micromachined ultrasonic transducer (PMUT). One of the exacting problems in the PMUT research is to… read more here.
Keywords: piezoelectric micromachined; silk piezoelectric; thin film; piezoelectric thin ... See more keywords
Transmitting Sensitivity Enhancement of Piezoelectric Micromachined Ultrasonic Transducers via Residual Stress Localization by Stiffness Modification
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2019.2904293
Abstract: Residual stress dramatically affects the performance of piezoelectric micromachined ultrasonic transducers (pMUTs), in particular, the transmitting sensitivity. This letter presents a novel architecture for pMUTs with V-shaped springs. Stiffness modification achieved by the V-shaped springs… read more here.
Keywords: piezoelectric micromachined; residual stress; transmitting sensitivity; micromachined ultrasonic ... See more keywords
Total-Focus Ultrasonic Imaging of Defects in Solids Using a PZT Piezoelectric Micromachined Ultrasonic Transducer Array
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2020.3032988
Abstract: This work demonstrates the ultrasonic imaging ability of piezoelectric micromachined ultrasonic transducer (PMUT) for the detection of defects deep in solids by total-focus imaging algorithm. The 3-MHz PMUT array uses thin-film PZT as the material… read more here.
Keywords: ultrasonic imaging; array; piezoelectric micromachined; focus ... See more keywords
A Novel Coupled Piezoelectric Micromachined Ultrasonic Transducer Based on Piston Mode
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2021.3090043
Abstract: This article presents a piezoelectric micromachined ultrasonic transducer (pMUT) modified with a piston diaphragm term as piston diaphragm pMUT (PD-pMUT). The transmission sound pressure level (SPL) and the frequency bandwidth of the modified transducer can… read more here.
Keywords: piezoelectric micromachined; pmut; piston; ultrasonic transducer ... See more keywords
Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14020374
Abstract: Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly developed in the last decade. With high output pressure to enable long-range detection and low power consumption (16 μW for over 1 m range detection has… read more here.
Keywords: micromachined ultrasonic; pmut rangefinders; range finding; piezoelectric micromachined ... See more keywords
Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer
Sign Up to like & getrecommendations! Published in 2018 at "Micromachines"
DOI: 10.3390/mi9090455
Abstract: This paper presents a fibered-epitaxial lead zirconate titanate (PZT) thin film with intermediate features between the monocrystalline and polycrystalline thin films for piezoelectric micromachined ultrasound transducer (pMUT). The grain boundaries confirmed by scanning electron microscopy,… read more here.
Keywords: thin films; piezoelectric micromachined; thin film; fibered epitaxial ... See more keywords