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Published in 2023 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2022.3213906
Abstract: A three degrees of freedom (3-DOF) piezoelectric micromanipulator (PEMMR) based on symmetric and antisymmetric bending of a cross-shaped beam is proposed in this article. Different from typical scheme of combining piezoelectric stack actuator (PSA) and…
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Keywords:
dof piezoelectric;
piezoelectric micromanipulator;
symmetric antisymmetric;
based symmetric ... See more keywords